Fusion® F07

For The Industry’s Most Demanding SubFab Applications

Semiconductor SubFab operators know downtime and maintenance are costly – that’s why Fusion® F07 is designed to meet and exceed the aggressive demands of SubFab environments.

Currently available as individual O-rings or assemblies for vacuum system lines, this new FKM elastomer is built to handle oxygen- and fluorine-based chemistries common in etch and CVD processes. Fusion® F07 boasts a continuous service temperature up to 355°F (180°C) with a 6-month expected lifetime in extreme conditions and an excursion service temperature of 428°F (220°C). When equipment failure is not an option, choose Greene Tweed.